Method of making mixed nitride films with at least two metals

Details Method of making mixed nitride films with at least two metals Method of making mixed nitride films with at least two metals

Filed on

1988-03-09

Date issued

1989-06-27

Examiner

Nguyen, Nam X.

Patent Class

Chemistry: electrical and wave energy

SubClass

Processes and products

SubSubClass

Vacuum arc discharge coating

Other Related Categories

20419216, 427 37, C23C 1422

Type

Patent

Status

active

Patent number

048427101

Description

ABSTRACT:
In particular for coating tools and product components, which are subject to extremely high wear, metal nitride films are used. It has been found that if the metals have markedly different melting points, in accordance with the invention, the concentrations of the metals can be varied as a function of the film thickness. For manufacturing such mixed nitride films by vaporization of metal alloy cathodes by means of an arc while simultaneously introducing nitrogen as reaction gas, a variable voltage is applied to the substrate during vaporization of the metal alloy and varied as a function of the film thickness on the substrate.

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Locker et al., "Preparation of Hafnium-Tantalum . . . ", 11/71, pp. 1856 to 1862.
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Smith, "Method of Varying Composition . . . ", 11/81, pp. 2962 to 2963.
Patent Abstracts of Japan, vol. 8, No. 98, 5/84, No 59-13608.
European Search Report.

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