Perpendicular magnetic recording medium, method for producing th

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering

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C23C 1400

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048427080

ABSTRACT:
A magnetic recording medium conventionally utilizes the in-plane magnetization mode, but recently the perpendicular magnetization mode utilizing the perpendicular anisotropy of an hcp cobalt alloy layer, in which the C axis is oriented perpendicular to the layer surface, has been proposed. The known perpendicular magnetic recording medium is produced by means of RF sputtering and comprises a Permalloy layer, as layer of a low coercive-force material, between the nonmagnetic base and the hcp cobalt alloy layer. The perpendicular anisotropy attained by the present invention in very excellent and is superior to that of a perpendicular recording medium having no Permalloy layer because a Co-Ta alloy is used as the layer of a low coercive-force material.

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Kadokura et al., "Deposition of Co-Cr Films for Perpendicular Magnetic Recording by Improved Opposing Targets Sputtering" IEEE Transactions on Magnetics, vol. Mag 17, No. 6 (Nov. 1981) pp. 3175-3177.
Norstrom, "The Electrical Characteristics of RF Magnetron and non-Magnetron Planar Systems" Pergamon Press, Jun. 1980, p. 225.
Naoe et al., "High Rate Deposition of Magnetic Films by Sputtering from Two Facing Targets" J. Crystal Growth 45, No. 1, Dec. 1978, p. 361.

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