Silicon based low level liquid sensor having a fast response tim

Details Silicon based low level liquid sensor having a fast response tim Silicon based low level liquid sensor having a fast response tim

1987-03-11

1988-09-13

Orsino, Jr., Joseph A.

Communications: electrical

Condition responsive indicating system

Specific condition

340620, 340622, 324 65R, 73295, 73304R, 338 22SD, G08B 2100

Patent

active

047712716

ABSTRACT:
A low liquid level sensor fabricated on a silicon substrate having four temperature dependent elements formed thereon in a Wheatstone Bridge configuration. A thin, wire-like extension of the substrate between two openings within the substrate provides a mounting member for the fourth element. The other three elements are spacially separated from the fourth element such that the fourth element becomes exposed to air during a low liquid level condition while the other three elements remain submerged within the liquid. Accordingly, the Wheatstone bridge configuration and relative positioning of the elements on the substrate eliminates the need for corrections due to temperature variations and power supply fluctuations.

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IEEE Publication; 1985; Design and Packaging of a Highly Sensitive Microtransducer for Air Flow and Differential Pressure Sensing Applications; Johnson et al.

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