Radiant energy – Radiation controlling means – Shields
Patent
1978-09-13
1979-10-16
Dixon, Harold A.
Radiant energy
Radiation controlling means
Shields
250482, G21F 302
Patent
active
041714890
ABSTRACT:
The discovery that boron nitride and boron carbide films can be made in tension allows nondistorting radiation windows or masks to be realized. Both low and high pressure techniques for making the tensile films lead to related mask structures utilizing such films. The resulting structures are sufficiently distortion free to be useful for x-ray lithography.
REFERENCES:
patent: 3742230 (1973-06-01), Spears et al.
patent: 3873824 (1975-03-01), Bean et al.
Adams Arthur C.
Capio Cesar D.
Levinstein Hyman J.
Sinha Ashok K.
Wang David N.
Bell Telephone Laboratories Incorporated
Dixon Harold A.
Shapiro Herbert M.
Torsiglieri Arthur J.
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