Gas separation – Combined or convertible
Patent
1987-05-11
1988-09-13
Nozick, Bernard
Gas separation
Combined or convertible
55473, 55DIG18, 55DIG29, 981153, 312223, B01D 5000
Patent
active
047706805
ABSTRACT:
A compact wafer carrier for storing spaced semiconductor wafers in parallel with each other, is provided for fabrication processes of a semiconductor device requiring a high particulate contamination control. The wafer carrier has an air cleaning device, including a secondary battery as a power source, a motor fan, and a particulate air filter, and a storing chamber directly connected to the air cleaning device for storing the wafers. The storing chamber has a first opening for receiving the filtered air flow, and a second opening for loading and unloading the wafers, both openings facing each other. As a result, the major part of the filtered air flows in a laminated stream passing along the surfaces of the wafers stored with a fairy high speed, serving to protect the wafers from the intrusion of the particles contained in the environmental air, and removing the particles originally adhered to the surfaces of the wafers.
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patent: 4660464 (1987-04-01), Tanaka
patent: 4666429 (1987-05-01), Shoji
Abiru Akira
Machida Akira
Fujitsu Limited
Nozick Bernard
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