Chemistry of inorganic compounds – Silicon or compound thereof – Binary compound
Patent
1992-03-27
1993-05-18
Chaudhuri, Olik
Chemistry of inorganic compounds
Silicon or compound thereof
Binary compound
55 76, 55 75, 203 71, 203 74, 4232452, C01B 3304, B01D 5302
Patent
active
052119319
ABSTRACT:
The present invention provides a method of removing impurities from a stream of silane, SiH.sub.4. Most notably, the present invention provides a method of removing ethylene from a silane stream by converting the ethylene to ethylsilane in the presence of a molecular sieve and distilling the desired silane from the ethylsilane contaminant.
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Allen Robert H.
Richards Douglas M.
Chaudhuri Olik
Eck Steven R.
Ethyl Corporation
Hammond Richard J.
Horton Ken
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