Method and apparatus for generating high resolution optical imag

Details Method and apparatus for generating high resolution optical imag Method and apparatus for generating high resolution optical imag

1992-06-19

1994-07-05

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356345, G01B 902

Patent

active

053272234

ABSTRACT:
A microscope interferometer is described, that scans an object surface through a membrane mask with a multitude of pinholes. Light reflected back through the pinholes interferes with the darkfield image of the mask surface. The mask to object separation can be stabilized by an air flow through the pinholes. Image processing techniques allow to overcome the Abbe diffraction limit for the lateral resolution.

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