Cryopump with differential pumping capability

Details Cryopump with differential pumping capability Cryopump with differential pumping capability

1991-05-17

1993-05-18

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

55269, 417901, B01D 800

Patent

active

052110222

ABSTRACT:
A cryopump is capable of pumping a process chamber at a process pressure and differentially pumping a second chamber such as an RGA independently at a substantially lower pressure. A member extends through the cryopump housing into a low pressure region disposed within the second stage array. The member comprises a port for accessing the low pressure region, thus providing an independent differential pumping source. No physical seal is required between the member and the main cryopump volume to maintain the pressure differential.

REFERENCES:
patent: 3122896 (1964-03-01), Hickey
patent: 3769806 (1973-11-01), Boissin et al.
patent: 4446702 (1984-05-01), Peterson et al.
patent: 4485631 (1984-12-01), Winkler
patent: 4555907 (1985-12-01), Bartlett
patent: 4724677 (1988-02-01), Foster
patent: 4838035 (1989-06-01), Carlson et al.
Haefer, "Cryogenic Vacuum Techniques," Journal of Physics E-Scientific Instruments, vol. 14, No. 3 Mar. 1981, pp. 273-288, Dorking (GB).
Longsworth et al., "A cryopumped leak detector," Journal of Vacuum Science & Technology/Section A, vol. 5, No. 4, Jul./Aug., No. 4, Part IV, pp. 2646-2649.

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