Apparatus for inspecting the surface of materials

Optics: measuring and testing – Crystal or gem examination – Axes determination

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356237, 356371, G01N 2188

Patent

active

052989631

ABSTRACT:
An apparatus for inspecting the surface of a sheet-like object has a movable stage with an object mounted thereon; a source for lighting the object on the stage, particularly by making a plurality of illumination lights respectively having different wavelengths incident on the surface of the object from respective predetermined directions; image pickup device for fetching the image of the object under illumination of the light as image data or the images of parts of the object as image data obtained on the respective different wavelengths; image data processing device for inspecting the image data for defects; and a device for synchronizing control either for flashing the light at a predetermined time interval just after the stage commences its movement, synchronously with fetching the image data or for flashing the light and simultaneously fetching the image data obtained on the respective different wavelengths, synchronously with the object on the stage reaching respective predetermined positions while moving the stage.

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Flamholz et al. "Scratch and Line Defect Detection System Using Oblique Light Modified to Detect Preferentially Scattered Light" IBM Technical Disclosure Bulletin, vol. 20, No. 1 (Jun. 1977) pp. 170-173.
Grosewald et al. "Automatic Detections of Defects on Wafers" IBM Technical Disclosure Bulletin, vol. 21, No. 6 (Nov. 1978) pp. 2336-2337.

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