Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1988-08-26
1990-03-20
Hayes, Monroe H.
Photocopying
Projection printing and copying cameras
Step and repeat
355 72, G03B 2742
Patent
active
049105493
ABSTRACT:
In an exposure method of the present invention, exposure light is radiated onto a peripheral portion of a substrate to be processed while the substrate is rotated, and the rotational speed of the substrate is selectively decreased when a specific peripheral portion reaches an exposure area, thereby performing predetermined exposure of the substrate. An exposure apparatus of the present invention includes a mounting table on which the substrate is mounted, a rotating mechanism for rotating the mounting table at a predetermined rotational speed, a light radiating element arranged to oppose a mounting surface of the mounting table, light amount control means for controlling the amount of light radiated from the light radiating element onto the substrate, and rotational speed control means for controlling the rotational speed of the mounting table in accordance with the radiation amount of light from the light radiating element.
REFERENCES:
patent: 4089605 (1978-05-01), Spence-Bate
patent: 4603968 (1986-08-01), Schmidt
Hayes Monroe H.
Tel Kyushu Limited
Tokyo Electron Limited
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