Deep level transient spectroscopy (DLTS) system and method

Details Deep level transient spectroscopy (DLTS) system and method Deep level transient spectroscopy (DLTS) system and method

1993-09-02

1996-05-28

Voeltz, Emanuel T.

Boots, shoes, and leggings

364482, 3241581, 324322, G01N 2702

Patent

active

055218393

ABSTRACT:
A computer-based deep level transient spectroscopy (DLTS) system (10) efficiently digitizes and analyzes capacitance and conductance transients acquired from a test material (13) by conventional DLTS methods as well as by several transient methods, including a covariance method of linear predictive modeling. A unique pseudo-logarithmic data storage scheme allows each transient to be tested at more than eleven different rates, permitting three to five decades of time constants .tau. to be observed during each thermal scan, thereby allowing high resolution of closely spaced defect energy levels. The system (10) comprises a sensor (12) for detecting capacitance and/or conductance transients, a digitizing mechanism (14) for digitizing the capacitance and/or conductance transients, preamplifiers (16a, 16b) for filtering, amplifying, and for forwarding the transients to the digitizing mechanism (14), a pulse generator (18) for supplying a filling pulse to the test material (13) in a cryostat (24), a trigger conditioner for coordinating the timing between the digitizing mechanism (14) and the pulse generator (18), and a temperature controller (26) for changing the temperature of the cryostat (24).

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