Method and apparatus for repairing defects in emulsion masks and

Details Method and apparatus for repairing defects in emulsion masks and Method and apparatus for repairing defects in emulsion masks and

1992-12-15

1994-06-07

Bowers, Jr., Charles L.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

430 22, 430945, 378 35, G03F 900

Patent

active

053188691

ABSTRACT:
Defective portions, such as black dot defects, in an emulsion layer of an emulsion mask such as a photomask are repaired or removed by irradiating an ultraviolet laser beam from a laser oscillator, preferably an excimer laser. The laser beam is passed through an adjustable aperture for shaping and is then projected onto defective portions in dimensional alignment, whereby the defective portions are destroyed. In order to ensure that only the defective portions are destroyed, the image of the aperture projected on the emulsion layer is observed so as not to cover the emulsion mask where defective portions do not exist. Defective portions such as white defects can also be repaired by using additional procedure together with the irradiation of the laser beam.

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The Focal Encyclopedia of Photography, Desk Ed., McGraw-Hill, 1969, p. 1597.
IBM Technical Disclosure Bulletin, Lajza, J. J.

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