High resolution pressure sensor

Measuring and testing – Fluid pressure gauge – Diaphragm

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73724, 73733, 3612833, G01L 912

Patent

active

053179188

ABSTRACT:
A pressure sensor comprises a pair of pressure compartments with deflective end walls and an elongated displaceable member with two extremities respectively anchored to the deflective end walls of the two pressure compartments, and a capacitor with first series of capacitor plates affixed to the elongated displaceable member and a second series of capacitor plates disposed in an alternating arrangement with the first series of the capacitor plates and affixed to a stationary member, wherein the pressure difference between the two pressure compartments displaces the elongated displaceable member in axial directions thereof and changes the capacitance value between the first and second series of capacitor plates and, consequently, the numerical value of the differential pressure is determined as a function of the measured value of the capacitance.

REFERENCES:
patent: 2368278 (1945-01-01), Warshaw
patent: 4523474 (1985-06-01), Browne et al.
patent: 4873870 (1989-10-01), Delatorre

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