Method of machining silicon nitride ceramics and silicon nitride

Details Method of machining silicon nitride ceramics and silicon nitride Method of machining silicon nitride ceramics and silicon nitride

1992-07-29

1994-03-29

Kisliuk, Bruce M.

Abrasive tool making process, material, or composition

Impregnating or coating an abrasive tool

51326, 51281R, B24B 100

Patent

active

052973654

ABSTRACT:
An industrially feasible method of grinding silicon nitride ceramics, is disclosed and provides a sufficiently smooth surface. Namely, the surface has a maximum height-roughness Rmax of 0.1 microns or less and a ten-point mean roughness Rz of 0.05 microns. Further, with this method, surface damage can be repaired while grinding. The vertical cutting feed rate of a grinding wheel into a workpiece should be within the range of 0.005-0.1 micron for each rotation of the working surface of the wheel and change linearly or stepwise. The cutting speed of the grinding wheel in a horizontal (rotational) direction should be within the range of 25 to 75 m/sec. With this arrangement, the contact pressure and grinding heat that is generated between the workpiece and the hard abrasive grains during grinding are combined. In other words, mechanical and thermal actions are combined.

REFERENCES:
patent: 4663890 (1987-05-01), Brandt
patent: 4839996 (1989-06-01), Sekiya
Robert Hahn, "On the Nature of the Grinding Process".

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