Refractory protective tube for the heat treatment of semiconduct

Details Refractory protective tube for the heat treatment of semiconduct Refractory protective tube for the heat treatment of semiconduct

1980-02-19

1983-01-11

Nilson, Robert G.

Fluid handling

Line condition change responsive valves

Direct response valves

118715, 137535, C23C 1308

Patent

active

043677681

ABSTRACT:
In a refractory protective tube for the heat treatment of semiconductor components which is constricted at one end and at such constricted end is provided with a treating or working gas inlet, said tube having opposite to said gas inlet a closed end provided with a gas outlet, the improvement for the prevention of back diffusion of ambient air wherein said closed end is closed by a cover which is fastened to a holding bracket which is movably suspended from the tube.

REFERENCES:
patent: 418867 (1890-01-01), Dundon
patent: 554344 (1896-02-01), McCormick
patent: 1246892 (1917-11-01), Donnelly
patent: 2612406 (1952-09-01), Kurata
patent: 3274917 (1966-09-01), Tolbert, Sr.
patent: 3823685 (1974-07-01), Koepp et al.
patent: 3900597 (1975-08-01), Chroma et al.
patent: 4173944 (1979-11-01), Koppl et al.

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