Method for measuring the reciprocal displacement of the layers o

Details Method for measuring the reciprocal displacement of the layers o Method for measuring the reciprocal displacement of the layers o

1992-03-25

1994-11-29

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

With light attenuation

356241, G01B 1122, G01N 2188

Patent

active

053694910

ABSTRACT:
A method for measuring the reciprocal displacement of the layers of a multilayer arrangement provided with conductors in described. The knowledge of the displacement makes it possible to in each case fix a suitable position for the holes through the multilayer arrangement to be subsequently produced and which are used for the electrical connection of the conductor planes. For this purpose, in a clearly defined position, each layer carries an optically recognizable pattern, said patterns at least partly being superimposed in the multilayer arrangement. In the multilayer arrangement at least one inspection hole is produced, which intersects the pattern of each layer. The cutting edges of each pattern are optically detected in the inspection hole and the position thereof is used for determining the reciprocal displacement of the layers.

REFERENCES:
patent: 4145714 (1979-03-01), MacDonald et al.
patent: 4560273 (1985-12-01), Ando et al.
patent: 4865448 (1989-09-01), Akutsu et al.
patent: 4930890 (1990-06-01), Hara et al.
IBM Technical Disclosure Bulletin "Optical System for Viewing Dielectric Smear in Printed Circuit Board Hole and Delete the Smear" vol. 25 No. 9, Feb. 1983, Johnson et al.

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