Micromechanical device with a trimmable resonant frequency struc

Details Micromechanical device with a trimmable resonant frequency struc Micromechanical device with a trimmable resonant frequency struc

1990-01-26

1992-09-01

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310321, 310323, 310367, H01L 4108

Patent

active

051441845

ABSTRACT:
A micromechanical device having a frequency trimmable, resonant structure, including a semiconductor substrate forming a support frame. First and second flexures flexibly couple and support a structure within the support frame, to permit rotation with a resonant frequency about a first axis which passes through the flexures. First and second elongated openings located proximate the first and second flexures form first and second tension relief beams adjacent the flexures, for providing stress relief of the tensile forces between the resonant structure and the flexures, and for establishing and trimming the resonant frequency of the resonant structure. The resonant structure may also include first and second regions located proximate the elongated openings, the regions having a thickness which is substantially less than the thickness of the remainder of the resonant structure, to permit removal of at least a portion of the regions thereby enlarging the elongated openings and further trimming the resonant frequency of the resonant structure. Also disclosed is a method of trimming the resonant frequency of such a micromechanical device.

REFERENCES:
patent: 3913035 (1975-10-01), Havens
patent: 4044305 (1977-08-01), Oberbeck
patent: 4234666 (1980-11-01), Gursky
patent: 4321500 (1982-03-01), Paros et al.
patent: 4447753 (1984-05-01), Ochiai
patent: 4468584 (1984-08-01), Nakamura et al.
patent: 4478076 (1984-10-01), Bohrer
patent: 4478077 (1984-10-01), Bohrer et al.
patent: 4483194 (1984-11-01), Rudolf
patent: 4484382 (1984-11-01), Kawashima
patent: 4490772 (1984-12-01), Blickstein
patent: 4495499 (1985-01-01), Richardson
patent: 4502042 (1985-02-01), Wuhrl et al.
patent: 4598585 (1986-07-01), Boxenhorn
patent: 4600934 (1986-07-01), Aine et al.
patent: 4619001 (1986-10-01), Kane
patent: 4628283 (1986-12-01), Reynolds
patent: 4639690 (1987-01-01), Lewis
patent: 4651564 (1987-03-01), Johnson et al.
patent: 4699006 (1987-10-01), Boxenhorn
patent: 4743789 (1988-05-01), Puskas
patent: 4789803 (1988-12-01), Jacobsen et al.
patent: 4805456 (1989-02-01), Howe et al.
patent: 4808948 (1989-02-01), Patel et al.
patent: 4851080 (1989-07-01), Howe et al.
patent: 4882933 (1989-11-01), Petersen et al.
patent: 4900971 (1990-02-01), Kawashima
patent: 4916520 (1990-04-01), Kurashima
patent: 5001383 (1991-03-01), Kawashima
patent: 5016072 (1991-05-01), Greiff
M. Nakamura et al., "Novel Electromechanical Micro-Machining and Its Application for Semiconductor Acceleration Sensor IC," Digest of Technical Papers (1987), Institute of Electrical Engineers of Japan, pp. 112-115.

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