Optics: measuring and testing – By polarized light examination – With light attenuation
Patent
1996-02-20
1997-06-10
Gonzalez, Frank
Optics: measuring and testing
By polarized light examination
With light attenuation
356377, 356371, 356394, G01B 1124
Patent
active
056381794
ABSTRACT:
Test reticle patterns (reticle pattern images) are transferred by exposure onto an unexposed wafer in a plurality of rows parallel to a predetermined direction, and a rotation angle of each reticle pattern image is obtained from an amount of positional displacement in the vertical direction (direction Y) (Steps 102 to 104). A rotation angle of each reticle pattern image is obtained from the bend of a moving mirror within an exposure range on a wafer stage which is obtained by correcting an amount of positional displacement in a horizontal direction (direction X) by the rotation angle obtained from the positional displacement in the vertical direction and the bend of the moving mirror assumed in a region outside the exposure range, and a residual rotation error between the thus obtained rotation angle and the actual rotation angle is obtained (Steps 105 to 107). An amount of bend of the moving mirror in the region outside the exposure range is obtained from the residual rotation error (Steps 108 and 109), thereby accurately measuring an amount of bend of the moving mirror in a region which is outside the exposure range and which is illuminated with a light beam from an interferometer for rotation error measurement.
REFERENCES:
patent: 5151749 (1992-09-01), Tanimoto et al.
patent: 5151750 (1992-09-01), Magome et al.
patent: 5473435 (1995-12-01), Masuyuki et al.
Gonzalez Frank
Nikon Corporation
Ratliff Reginald A.
LandOfFree
Method for measuring amount of bend of moving mirror does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for measuring amount of bend of moving mirror, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for measuring amount of bend of moving mirror will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-769307