Method to detect non-spherical particles using orthogonally pola

Details Method to detect non-spherical particles using orthogonally pola Method to detect non-spherical particles using orthogonally pola

1995-04-11

1997-06-10

Allen, Stephone

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356343, 2502222, G01N 1506

Patent

active

056378815

ABSTRACT:
A structure and a method provide a quasi bright field particle sensor for the detection of non-spherical particles, using a laser beam of predetermined polarization. A phase shift caused by non-spherical particles passing through the laser beam is utilized to detect the presence of such particles. In one embodiment, a single laser beam is used to detect the concentration of non-spherical particles in the pump line receiving the exhaust gas from a process chamber.

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patent: 5133602 (1992-07-01), Batchelder et al.
patent: 5266798 (1993-11-01), Borden et al.
patent: 5296910 (1994-03-01), Cole
patent: 5347138 (1994-09-01), Aqui et al.

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