Method for fabricating a field emission display

Details Method for fabricating a field emission display Method for fabricating a field emission display

1995-06-07

1998-04-07

Ramsey, Kenneth J.

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

445 59, H01J 902

Patent

active

057357218

ABSTRACT:
A method for fabricating a field emission display device, in which a photoresist is formed on a gate electrode layer to form a release layer, a metal mask is formed thereon, and holes are etched to form micro-tips, thus simplifying the fabrication process thereof. Also, the size and shape of the micro-tips are easily adjustable. Further, since the photoresist can be easily soluble in a solvent, the problem of contamination during the etching process is resolved, thereby improving the reliability of a manufactured field emission display device.

REFERENCES:
patent: 3755704 (1973-08-01), Spindt et al.
patent: 4857161 (1989-08-01), Borel et al.
patent: 4857799 (1989-08-01), Spindt et al.
patent: 4933303 (1990-06-01), Mo
patent: 5244428 (1993-09-01), Welsch et al.

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