Optical system for use of a laser processing machine

Details Optical system for use of a laser processing machine Optical system for use of a laser processing machine

1989-08-17

1990-10-23

Bovernick, Rodney D.

G02B 306

Patent

active

049647040

ABSTRACT:
An improved optical system suitable for laser processing in semiconductor manufacture. The system is composed of three convex lenses. By suitably selecting the type of each of the lenses, a limited spherical aberration is obtained without compromising the numerical aperture.

REFERENCES:
patent: 4043641 (1977-08-01), Gottlieb

Affiliated with

Also associated with

Rating

Optical system for use of a laser processing machine does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Optical system for use of a laser processing machine, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical system for use of a laser processing machine will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-762442