Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent
1998-04-17
1999-10-26
Rosasco, S.
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
G03F 900
Patent
active
059725427
ABSTRACT:
A method of making a phase mask for imposing on light transmitted therethrough an interference pattern. The method comprises various steps including the step of depositing a solidifiable material on a substrate with a first surface relief pattern. The solidifiable material is selected so that the phase mask is at least half as transmissive as it is absorptive of light characterized by a spectral line having a wavelength between 275 and 390 nm. The material is solidified and removed from the substrate so as to yield the phase mask with a second surface relief pattern complementary to the first surface relief pattern.
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D-Star Technologies, Inc.
Rosasco S.
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