CVD process for coating the inside of hollow bodies

Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of substrate or post-treatment of coated substrate

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Details

427539, 427237, 427238, 427 8, 427575, C23C 1652, C23C 722, B05D 306

Patent

active

059724366

ABSTRACT:
A process for CVD coating of a hollow body with a barrier layer, comprising measuring the temperature inside of the body by igniting plasma within said body with at least one ignition pulse and correlating the time between the ignition pulse and a pulse of light given off by plasma ignition, and a device for carrying out such a process.

REFERENCES:
patent: 4888199 (1989-12-01), Felts et al.
patent: 5154943 (1992-10-01), Etzkorn
patent: 5236511 (1993-08-01), Etzkorn et al.
patent: 5308650 (1994-05-01), Krummel et al.

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