Cooling method, cooling apparatus and treatment apparatus

Details Cooling method, cooling apparatus and treatment apparatus Cooling method, cooling apparatus and treatment apparatus

1998-03-12

1999-10-26

Bennett, Henry

Refrigeration

Using electrical or magnetic effect

Thermoelectric; e.g., peltier effect

34428, 34429, 34430, 34433, F25B 2102

Patent

active

059707178

ABSTRACT:
An apparatus is provided with a cooling unit for cooling a treatment substrate, a supporting body for supporting the treatment substrate before being transferred to the cooling unit and a cooling apparatus for cooling the treatment substrate supported by the supporting body. The apparatus cools the treatment substrate in a position where the treatment substrate stands by before being transferred into the cooling unit and thereafter cools the cooled treatment substrate in the cooling unit, which makes rapid and accurate cooling possible.

REFERENCES:
patent: 4414758 (1983-11-01), Peter et al.
patent: 4667478 (1987-05-01), Jones, III
patent: 4777733 (1988-10-01), Usuiwa et al.
patent: 4934151 (1990-06-01), Shima
patent: 5315834 (1994-05-01), Garunts et al.
patent: 5551165 (1996-09-01), Turner et al.

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