Electricity: electrical systems and devices – Electrostatic capacitors – Variable
Patent
1994-03-28
1995-07-25
Reynolds, Bruce A.
Electricity: electrical systems and devices
Electrostatic capacitors
Variable
361278, 73724, H01G 700, H01G 5011, G01L 912
Patent
active
054367956
ABSTRACT:
A monolithic capacitive pressure transducer (12, 12') is made by separately forming under pressure a diaphragm (22, 22') and a base (24, 24') having a recess (14) in the top surface using ceramic powder coated with an organic binder. Metal layers are deposited on the two pieces and the pieces are then joined together to form a single unit. A spacer (36) may be inserted in the recess to ensure that a predetermined gap is maintained between the two parts during the joining operation. The parts are then heated to allow the binder organics, as well as the spacer organics if a spacer is employed, to be vaporized and/or decomposed and removed through the open pores of the diaphragm and base and then sintered to change the parts into a monolithic body and to convert the metallized layer into a conductive layer bonded to the ceramic. In one embodiment the metal layers include terminal pads (18b, 19c, 20c) formed on the diaphragm and joinder pads (19b, 20b) formed on the base around terminal receiving bores (34, 32) each in alignment with a terminal pad. In a second embodiment terminal pads (18b', 19d', 20d') are formed on the diaphragm with vias extending radially inwardly from terminal pads (19d', 20d') to respective connecting pads (19c', 20c') which are aligned with joinder pads (19b', 20b') formed on the base. The base has a recessed portion (24b') in its outer wall providing access to terminal pads (18b', 19d', 20d').
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Copending application Ser. No.: 07/972,680, Filed on Nov. 6, 1992, Pressure Transducer Apparatus, V. Shukla et al.
Bishop Robert P.
Hainey Paul L.
Baumann Russell E.
Donaldson Richard L.
Grossman Rene E.
Mills Gregory L.
Reynolds Bruce A.
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