Coating processes – Electrical product produced – Welding electrode
Patent
1982-05-13
1984-03-06
Newsome, John H.
Coating processes
Electrical product produced
Welding electrode
2041571R, 427 86, C23C 1300
Patent
active
044354452
ABSTRACT:
A process and apparatus for depositing a film from a gas involves introducing the gas to a deposition environment containing a substrate, heating the substrate, and irradiating the gas with radiation having a preselected energy spectrum, such that a film is deposited onto the substrate. In a preferred embodiment, the energy spectrum of the radiation is below or approximately equal to that required to photochemically decompose the gas. In another embodiment, the gas is irradiated through a transparent member exposed at a first surface thereof to the deposition environment, and a flow of substantially inert gaseous material is passed along the first surface to minimize deposition thereon.
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White et al., "IBM TDB", vol. 5, No. 3, Aug. 1962, pp. 3,4.
Perkins et al., "The 147-nm Photolysis of Monosiline", Journal of the American Chemical Society, 101:5, 1979.
Krene et al., "Photolysis of Diborane at 1849A", Journal of Chemical Physics, vol. 37, No. 2, 1962.
Allred David D.
Ovshinsky Stanford R.
Reyes Jaime M.
Walter Lee
Energy Conversion Devices Inc.
Newsome John H.
Norris Lawrence G.
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