Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Patent
1991-11-12
1992-09-15
Nelms, David C.
Radiant energy
Photocells; circuits and apparatus
Photocell controls its own optical systems
356401, G01N 2186
Patent
active
051480352
ABSTRACT:
A device for detecting a positional relationship between opposed first and second objects, with respect to a first direction perpendicular to the opposing direction. The device includes a light source for projecting light to the first and second objects, a photodetecting portion for receiving light from one of the first and second objects irradiated with the light from the light source, the photodetecting portion being operable to detect a predetermined parameter related to the light, which parameter is changeable with the positional relationship between the first and second objects with respect to the first direction, a first position detecting system for detecting a positional relationship between the first and second objects, with respect to a second direction perpendicular to the opposing direction of the first and second objects and having an angle with respect to the first direction, and a second position detecting system for detecting the positional relationship between the first and second objects with respect to the first direction, on the basis of the detection by the photodetecting system and the first position detecting system.
REFERENCES:
patent: 4037969 (1977-07-01), Feldman et al.
patent: 4326805 (1982-04-01), Feldman et al.
patent: 4360273 (1982-11-01), Thaxter
patent: 4398824 (1983-08-01), Feldman et al.
patent: 4514858 (1985-04-01), Novak
patent: 4539482 (1985-09-01), Nose
patent: 4545683 (1985-10-01), Markle
patent: 4636626 (1987-01-01), Hazama
patent: 4656347 (1987-04-01), Une
patent: 4662753 (1987-05-01), Yabu
patent: 4701050 (1987-10-01), Oshida
patent: 4812661 (1989-03-01), Owen
patent: 4870289 (1989-09-01), Sato
Feldman, et al., "Application of Zone Plates to Alignment in X-ray Lithography," Optical Engineering, vol. 22, Mar.-Apr. 1983, pp. 203-207.
Hattori Jun
Suda Shigeyuki
Canon Kabushiki Kaisha
Nelms David C.
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