Semiconductor tester system including test head supported by waf

Details Semiconductor tester system including test head supported by waf Semiconductor tester system including test head supported by waf

1997-09-15

2000-03-21

Patidar, Jay

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324758, G01R 3102

Patent

active

06040700&

ABSTRACT:
In a semiconductor tester system including a wafer prober, the entire weight of the test head assembly is carried by the wafer prober frame. In one embodiment, a probe card is releasably attached to the test head assembly through a ring carrier and the probe tips are planarized during initial installation. In another embodiment, the probe card is attached directly to the test head assembly and the probe tips are planarized each time the probe card is changed.

REFERENCES:
patent: 5754057 (1998-05-01), Hama et al.
patent: 5804983 (1998-09-01), Nakajima et al.
patent: 5821763 (1998-10-01), Beaman et al.

Affiliated with

Also associated with

Rating

Semiconductor tester system including test head supported by waf does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor tester system including test head supported by waf, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor tester system including test head supported by waf will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-733344