Patent
1983-07-29
1985-10-29
Munson, Gene M.
357 15, 357 16, 357 22, H01L 2978, H01L 2956, H01L 29205, H01L 2980
Patent
active
045503311
ABSTRACT:
A charge couple device structure includes a thin layer of undoped Al.sub.x Ga.sub.1-x As as a spacer layer between an n.sup.+ doped Al.sub.x Ga.sub.1-x As layer and an undoped GaAs layer or substrate. This multilayer, selectively doped heterostructure supports a two-dimensional electron gas at the interface of the undoped spacer layer and the GaAs layer which permits both increased dynamic range and high speed charge transfer.
REFERENCES:
patent: 4285000 (1981-08-01), Deyhimy et al.
patent: 4424525 (1984-01-01), Mimura
Tsui et al., "Transport Properties of GaAs-AlGaAs Heterojunction Field-Effect Transistors", Appl. Phy. Lett., vol. 39 (Nov. 1, 1981), pp. 712-714.
Drummond et al., "Transport in Modulation-Doped Structures (AlGaAs/GaAs) . . . ", Appl. Phy. Lett., vol. 41 (Aug. 1, 1982), pp. 277-279.
Hamann H. Fredrick
Malin Craig O.
Munson Gene M.
Rockwell International Corporation
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