Electric heating – Metal heating – By arc
Patent
1982-09-27
1985-10-29
Paschall, M. H.
Electric heating
Metal heating
By arc
219121PV, 219121PD, 414331, 156345, B23K 900
Patent
active
045502420
ABSTRACT:
An automatic plasma processing device having a substantially vertically disposed plasma chamber in which a plurality of semiconductor wafers are processed with plasma simultaneously. The device comprises a container cassette adapted to contain a plurality of wafers therein, a feeding mechanism for feeding the cassette to a predetermined position, a replacing mechanism for taking out the wafers from the cassette placed at the predetermined position, a holding frame operable to receive the wafers from the replacing mechanism and hold the same therein, a driving mechanism for moving the holding frame up and down into and out of the plasma chamber, a plasma generating mechanism for generating plasma in the plasma chamber, and a control system for controlling the aforesaid mechanisms. The automatic plasma processing device has a simplified construction and automatically and successively processes a large number of wafers, while at the same time being compact.
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Hijikata Isamu
Nakane Hisashi
Nakayama Muneo
Uehara Akira
Cantarella John J.
Carrier Joseph P.
Paschall M. H.
Tokyo Denshi Kagaku Kabushiki Kaisha
Weiner Irving M.
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