Method of making PMOSFETs having indium or gallium doped buried

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437 41, H01L 21265

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active

057100551

ABSTRACT:
Sub-micron PMOSFETs including n.sup.+ polysilicon gates and buried channels having impurity concentrations comprising indium or gallium are provided. The buried channel PMOSFETs have improved short channel characteristics and are particularly suitable for use in CMOS technologies.

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