Piezoelectric crystalline ZnO with 0.01 to 20.0 atomic % Mn

Details Piezoelectric crystalline ZnO with 0.01 to 20.0 atomic % Mn Piezoelectric crystalline ZnO with 0.01 to 20.0 atomic % Mn

1978-01-25

1979-02-27

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

252 629, H01L 4118

Patent

active

041421248

ABSTRACT:
Piezoelectric crystalline films which consist essentially of a crystalline zinc oxide film with a c-axis perpendicular to a substrate surface containing 0.01 to 20.0 atomic percent of manganese with or without 0.01 to 20.0 atomic percent of copper.

REFERENCES:
patent: 3091707 (1963-05-01), Hutson
patent: 3440550 (1969-04-01), Moore
patent: 3471721 (1969-10-01), Moore
patent: 3766041 (1973-10-01), Wasa et al.

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