Automated washing system and method

Details Automated washing system and method Automated washing system and method

1999-09-02

2000-03-21

Stinson, Frankie L.

Cleaning and liquid contact with solids

Apparatus

With plural means for supplying or applying different fluids...

134 953, 1341023, 134902, 1341041, B08B 310

Patent

active

060390573

ABSTRACT:
A system and a method for washing objects, such as cassettes and carriers used to hold and transport silicon wafers during manufacture of semiconductor chips. The method employs the steps of exposing to ultraviolet radiation the objects in a process chamber, spraying of developer fluid onto the objects, rinsing the objects, spraying of surfactant solution on the objects, rinsing the objects and drying the objects using heated, ionized ULPA filtered air. Apparatus for accomplishing the above is disclosed.

REFERENCES:
patent: 4760014 (1988-07-01), Wong
patent: 5151135 (1992-09-01), Magee et al.
patent: 5301700 (1994-04-01), Kamikawa et al.
patent: 5715851 (1998-02-01), Jung et al.
patent: 5749975 (1998-05-01), Li et al.

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