Short arm manipulator for standard mechanical interface apparatu

Details Short arm manipulator for standard mechanical interface apparatu Short arm manipulator for standard mechanical interface apparatu

1985-08-26

1987-06-23

Spar, Robert J.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

414608, 414618, 414733, 414742, B65G 6500

Patent

active

046749365

ABSTRACT:
Disclosed is a manipulator for removing a cassette holding articles, such as semiconductor wafers, to be processed from a container supported on a processing station in a standard mechanical interface (SMIF) system. The container is supported on an interface port on the canopy of the processing station. A first platform is transportable along a shaft below the interface port. The platform is operable to mate with the interface port and receive the cassette from the container. The first platform is transported down the shaft, thereby removing the cassette from the container. An arm orthogonal to the shaft and mounted in the shaft supports a pivoting arm which swings to engage the cassette on the first platform and support the cassette off of the first platform. The pivoting arm pivots to transport the cassette to a location away from the shaft. The first platform is then transported back up the shaft to the interface port to seal the container to prevent particulate contamination. The pivot arm then pivots to swing the cassette to a host elevator which is located in alignment with the shaft below the first platform.

REFERENCES:
patent: 2914203 (1959-11-01), Gafner
patent: 3187917 (1965-06-01), Miller
patent: 4336423 (1982-12-01), Inaba et al.
patent: 4336438 (1982-06-01), Uehara et al.
patent: 4343584 (1982-08-01), Hudgins
patent: 4412771 (1983-11-01), Gerlach et al.
patent: 4518298 (1985-05-01), Yasukawa
patent: 4532970 (1985-08-01), Tullis et al.

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