Semiconductor acceleration sensor and its fabrication method

Details Semiconductor acceleration sensor and its fabrication method Semiconductor acceleration sensor and its fabrication method

1996-02-09

1997-09-09

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7351433, 7351436, G01P 1500

Patent

active

056659148

ABSTRACT:
The invention provides a high-reliability inexpensive semiconductor acceleration sensor requiring no special material for a pedestal, making is possible to decrease the number of materials and the number of assembly steps. A semiconductor acceleration sensor includes a circuit substrate having a thick-film circuit including at least a circuit conductor and an insulating layer, a pedestal on the circuit substrate, a flexible acceleration detecting beam supported by the pedestal and deflecting in response to acceleration, a sensor device on the acceleration detecting beam converting deflection of the acceleration detecting beam into an electrical signal, and a conductor connecting the sensor device with the thick-film circuit wherein the pedestal is the same material as at least one of the circuit conductor and the insulating layer.

REFERENCES:
patent: 5150616 (1992-09-01), Kondo et al.

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