Data processing: measuring – calibrating – or testing – Measurement system – Dimensional determination
Patent
1997-11-21
1999-09-28
Shah, Kamini
Data processing: measuring, calibrating, or testing
Measurement system
Dimensional determination
702166, 356375, 356358, 382154, G06F 1520, G01B 1124
Patent
active
059603798
ABSTRACT:
A shape measuring apparatus includes a partial surface measuring device for dividing a surface to be measured having a three-dimensional shape into a plurality of partial regions having mutually overlapped regions and measuring surface shapes of the plurality of partial regions. Movement mechanisms for respectively determining positional attitudes of the partial regions and the partial surface measuring device are also includes, along with a measurement controller for roughly joining measured data on the surface shapes of the partial regions to one another, based on the positional attitudes. Thereafter, fitting of the measured data on the surface shape of the other partial region to the measured data on the surface shape of one partial region in the overlapped regions is performed only in the direction of the substantial normal to the surface of each overlapped region so as to join adjacent the partial regions to one another. The shape measuring apparatus, and corresponding method of use, measures the entire three-dimensional shape of the surface to be measured.
REFERENCES:
patent: 5343410 (1994-08-01), Tsujiuchi et al.
M. Otsubo, et al., "Measurement of Large Plane Surface Shape with Interferometric Aperture Synthesis", SPIE vol. 1720 (1992). pp. 444-447.
M. Otsubo, et al., "Measurment of large plane surface shapes by connecting small aperture interferogramams", Optical Engineering, vol. 33, No. 2, Feb. (1994), pp. 608-613.
Ogawa et al., "Correction of Aspherical-surface processed shape by Shape measuring device and aspherical surface programming device", O Plus E, No. 155, (Oct. 1992), pp. 86-92.
Gemma, T., "Interferometer for Testing Aspheric Surfaces with Computer-generated Holograms", SPIE Proc., 1332, pp. 1791-1795. No Date.
Shimizu Keishi
Ueyanagi Kiichi
Yamada Hidenori
Fuji 'Xerox Co., Ltd.
Shah Kamini
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