Method to analyze particle contaminants in compressed gases

Measuring and testing – Gas analysis – Solid content of gas

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73 3103, 7386481, G01N 100

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active

056659024

ABSTRACT:
A system and a method for analyzing impurities in compressed gas, a method for controlling the particle growth in the monitored gas and a method for determining the optimum monitoring temperature for an individual gas are disclosed. The system includes a source of compressed gas, a sensor for measuring particle impurity within the gas, a temperature controller for controlling the temperature of the gas prior to said gas entering the sensor, with the temperature being controlled to eliminate particle formation from molecular clustering and condensation, and a pressure balancer.

REFERENCES:
patent: 3892549 (1975-07-01), Lyschkow
patent: 4154088 (1979-05-01), Werner
patent: 5101671 (1992-04-01), Elgas
patent: 5209102 (1993-05-01), Wang et al.
patent: 5214952 (1993-06-01), Leggett et al.
Aerosol Science and Technology, "Thermal Rebound of Nanometer Particles in a Diffusion Battery", Hwa-chi Wang, vol. 18, No. 2, 1993, pp. 180-186.
Microcontamination Conference Proceedings "Particle Counting in Electronic Specialty Gases: Metrology and Applications", 1993, Wang et al., pp. 465-472.

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