Photography – Fluid-treating apparatus – Fluid application to one side only of photographic medium
Patent
1997-12-03
1999-09-28
Rutledge, D.
Photography
Fluid-treating apparatus
Fluid application to one side only of photographic medium
396627, G03D 500
Patent
active
059602252
ABSTRACT:
A substrate treatment apparatus comprises an arm holder for substantially horizontally holding each of substrates, a substrate transfer mechanism, having a vertical shaft, for moving the arm holder along the vertical shaft, swinging the arm holder about the vertical shaft, and horizontally advancing and retreating the arm holder, a first liquid process unit including a casing, a substrate carry-in/carry-out port formed in the casing and permitting a first substrate to be carried therethrough together with the arm holder, and a plurality of treatment members contained in the casing for treating the first substrate with a liquid, and a second liquid process unit located adjacent to the first liquid process unit, and including the casing, a substrate carry-in/carry-out port formed in the casing and permitting a first substrate to be carried therethrough together with the arm holder, and a plurality of treatment members contained in the casing for treating the second substrate with a liquid. Each of the treatment members of the first liquid process unit and a corresponding one of the treatment members of the second liquid process unit are arranged symmetrical on a horizontal plane with respect to the arm holder.
REFERENCES:
patent: 5002008 (1991-03-01), Ushijima et al.
patent: 5250114 (1993-10-01), Konishi et al.
patent: 5489337 (1996-02-01), Nomura et al.
patent: 5664254 (1997-09-01), Ohkura et al.
patent: 5672205 (1997-09-01), Fujimoto et al.
Rutledge D.
Tokyo Electron Limited
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