Electrochemical polishing system

Chemistry: electrical and wave energy – Apparatus – Electrolytic

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Details

204271, 204DIG9, C25F 700, B23P 102

Patent

active

042060281

ABSTRACT:
Pulses of a pulse duration not greater than 100 microseconds are applied by an electronic switch between a tool electrode having abrasive particles distributed over its surface and a workpiece across a polishing gap supplied with an electrolyte.

REFERENCES:
patent: 3748239 (1973-07-01), De Lavalette
patent: 3798141 (1974-03-01), Yahalom
patent: 4004992 (1977-01-01), Tyler et al.
patent: 4052274 (1977-10-01), Chikamori
patent: 4097710 (1978-06-01), Maillet
patent: 4110190 (1978-08-01), Visser
patent: 4140598 (1979-02-01), Kimoto et al.

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