Integrated circuit fabrication

Details Integrated circuit fabrication Integrated circuit fabrication

1994-12-22

1996-07-23

Dang, Trung

Fishing, trapping, and vermin destroying

437194, 437197, 437198, 437199, 437225, 437246, H01L 2144, H01L 2148

Patent

active

055389210

ABSTRACT:
After multilayer conductive stacks are defined in a semiconductor processing sequence, rinsing with a dilute solution of surfactants is performed to remove halogen residues which may ultimately contribute to subsequent undesirable corrosion of the stack.

REFERENCES:
patent: 4529800 (1986-06-01), Landau et al.
patent: 5198388 (1993-03-01), Kawai
patent: 5290733 (1994-03-01), Hayasaka et al.
patent: 5312776 (1994-05-01), Murakami et al.
patent: 5345108 (1994-09-01), Kikkawa
patent: 5427666 (1995-06-01), Mueller et al.

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