Method of precisely adjusting the frequency of a piezoelectric r

Coating processes – Measuring – testing – or indicating – Thickness or uniformity of thickness determined

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29 2535, 427 38, 427 541, 427100, B05D 306

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047612983

ABSTRACT:
The frequency of a piezoelectric resonator is precisely adjusted using monomolecular layer(s) of a thermally stable, low stress, uniform insulating film deposited on the active area of the resonator. The method is particularly suitable for precisely adjusting the frequencies of high frequency (i.e., very thin) resonators, and the frequencies of lateral field resonators, without degrading stability.

REFERENCES:
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patent: 4252839 (1981-02-01), Wakasugi
patent: 4396704 (1983-08-01), Taylor
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patent: 4417948 (1983-11-01), Mayne-Banton et al.
patent: 4654118 (1987-03-01), Staples
"An Applied Science Perspective of Langmuir-Blodgett Films", by G. G. Robs, in Advances in Physics, vol. 34, pp. 475-512, 1985.
"Formation and Properties of Ultra Thin Polyimide Films Through the Langmuir-Blodgett Technique", by Masazaku Uekita, Hiroshi Awaji and Makoto Murata, at the Third International Symposium on Molecular Electronic Devices, Arlington, VA, Oct. 6-8, 1986.

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