Silicone oil-filled semiconductor pressure sensor

Details Silicone oil-filled semiconductor pressure sensor Silicone oil-filled semiconductor pressure sensor

1995-06-01

1997-04-29

Chilcot, Richard

Measuring and testing

Fluid pressure gauge

Diaphragm

73756, G01L 1302, G01L 1500, G01L 700

Patent

active

056251513

ABSTRACT:
A semiconductor pressure sensor that can be inexpensively manufactured with a reduced number of assembly steps and without using spacers includes a stem having an upper surface on which are mounted a pedestal and a semiconductor pressure sensor chip of substantially the same area as that of the stem upper surface. The semiconductor pressure sensor chip and the pedestal include aligned lead insertion holes through which leads are inserted. While spacers have been used in the prior art to reduce vacant space in the sensor that is filled with silicone oil, the spacers can be dispensed with in the invention because the semiconductor pressure sensor chip and the pedestal have areas substantially the same as the stem upper surface and serve as spacers.

REFERENCES:
patent: 4691575 (1987-09-01), Sonderegger et al.
patent: 4771639 (1988-09-01), Saigusa et al.
patent: 4809555 (1989-03-01), Kunz
patent: 4825685 (1989-05-01), Breimesser
patent: 4993266 (1991-02-01), Omura et al.

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