Method and apparatus for compensating for reaction forces in a s

Details Method and apparatus for compensating for reaction forces in a s Method and apparatus for compensating for reaction forces in a s

1998-03-04

1999-09-28

Sircus, Brian

Electricity: motive power systems

Positional servo systems

With particular motor control system responsive to the...

318560, 318671, 414788, G05B 1100

Patent

active

059594276

ABSTRACT:
A stage assembly which includes a stage which moves on a base, where the base is suspended on a foundation, minimizes disturbance to the base caused by linear acceleration of the stage during its movement. Reaction cancellation forces are applied through the stage center of gravity, hence there is no uncancelled reaction moment and no disturbance of the base stability. The net reaction cancellation force is applied in line with the stage center of gravity and parallel to the stage direction of travel. Alternatively, the base is isolated from the reaction forces by a rigid linkage between the stage linear actuator and a foundation.

REFERENCES:
patent: 4525659 (1985-06-01), Imahashi et al.
patent: 4812725 (1989-03-01), Chitayat
patent: 5022619 (1991-06-01), Mamada
patent: 5744924 (1998-04-01), Lee

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