Multi-variable statistical process controller for discrete manuf

Details Multi-variable statistical process controller for discrete manuf Multi-variable statistical process controller for discrete manuf

1993-09-20

1995-04-18

Gordon, Paul P.

Boots, shoes, and leggings

364468, 364552, G06F 1546, G05B 1304

Patent

active

054084059

ABSTRACT:
A method and system for controlling a plurality of process control variables for processing discrete products is described. The method comprising: utilizing process models relating a plurality of product quality parameters to the plurality of process control variables; measuring the plurality of product quality parameters on a first plurality of products; exercising statistical quality control tests on the plurality of product quality parameters of the first plurality of products; continuing processing if statistical quality control tests are successful; otherwise measuring the plurality of product quality parameters on a second plurality of products; tuning the process models to create tuned process models using the plurality of product quality parameters from the second plurality of products, wherein the tuning estimates a changed state of the processing; estimating new values for the plurality of process control variables from the tuned models; processing a third plurality of products at the new values of the plurality of process control variables; measuring the plurality of product quality parameters on the third plurality of products; repeating the tuning of the process models and the estimating new values for the plurality of process control variables if the quality control parameters from the third plurality of products are not acceptable; otherwise continuing processing products with the new values of the plurality of process control variables if the quality control parameters from the third plurality of products are acceptable.

REFERENCES:
patent: 3751647 (1973-08-01), Maeder et al.
patent: 5196997 (1993-03-01), Kurtzberg et al.
The Process Control Systems in Sub-0.5 Micron Factories, P. K. Mozumder, presented at International Symposium on Semiconductor Manufacturing in Austin, Tex., Sep. 20, 1993.
A Monitor Wafer Based Controller for PECVD Silicon Nitride Process on AMT, P. K. Mozumder, et al., IEEE/SEMI Advanced Semiconductor Manufacturing Conference, Presented Oct., 1993, pp. 136-141.

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