Sensor unit having multiple sensors each providing independent d

Details Sensor unit having multiple sensors each providing independent d Sensor unit having multiple sensors each providing independent d

1998-03-24

1999-09-28

Williams, Hezron

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73862043, G01N 1509

Patent

active

059592095

ABSTRACT:
A sensor unit is provided for detecting a physical quantity with improved accuracy while maintaining acceptable detection limits. The sensor unit includes at least three three-axis sensors for three-dimensionally detecting the magnitude and direction of a physical quantity wherein the three sensors are disposed in one plane. Each three-axis sensor includes: an operating member; a supporting base having a hollow with the operating member being located at the center of the hollow; and a flexible plate having a piece of piezoelectric material in contact with at least one pair of electrodes and extending across the hollow at an end of the supporting base, the operating member being suspended at the center of the hollow by the flexible plate. The three three-axis sensors are assigned the X, Y, and Z directions, respectively, of a three-dimensional coordinate system so that the physical quantity applied from the outside is detected for each component in the X, Y, and Z directions independently of each other.

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