Method of fabricating a pressure sensor

Details Method of fabricating a pressure sensor Method of fabricating a pressure sensor

1981-12-28

1984-01-17

Lusignan, Michael R.

Coating processes

Electrical product produced

4273763, 4273766, 427377, 4273835, 4273977, 427 79, 29 2541, B05D 512

Patent

active

044264062

ABSTRACT:
A pressure sensor including a pressure capsule such as a dual diaphragm quartz capacitance pressure capsule and structure for supporting and sealing same within the pressure environment to be measured. The pressure capsule having two parallel quartz plates spaced by a dielectric ring forming a vacuum chamber therein. The structure providing a force balanced support for compressively loading the pressure capsule through the dielectric ring. The structure further having transfer port therein to communicate the pressure environment to both plates.
The method of making the quartz capacitive pressure capsule includes the steps of surface preparation, preglazing of the component parts and vacuum cooling by utilizing a controlled pressure-temperature profile.
A registration fixture is described which contains a plurality of flat plates, each plate having a pressure capsule receiving cavity sized to closely receive one of the quartz plates and further provides a uniform temperature radiation pattern for sealing of the pressure capsule during the controlled pressure-temperature profile.

REFERENCES:
patent: 2461878 (1949-02-01), Christensen
patent: 4184189 (1980-01-01), Davis et al.
Holmes et al Handbook of Thick Film Technology Electrochemical Publications Limited, Glasgow 1976 pp. 97-103.

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