Optical system for stereoscopically measuring feature heights ba

Image analysis – Applications – 3-d or stereo imaging analysis

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356376, G01B 1122

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active

058321071

ABSTRACT:
Two stereoscopic images of the surface of an inspected object are projected by two different lens systems to two separate video cameras for recording thereby and for display via a CPU on a 3D monitor. The optical axes of the two lens systems are equiangularly spaced from a central Z axis extending normal to the object plane, so that the height of a feature on the surface of the workpice may be calculated by determining the difference in the amount of lateral offset in the X direction from the center of a displayed image of a given feature as shown in one of the displayed images from the amount of its corresponding lateral offset in the other image, and then calculating Z in accordance with the formula Z=the difference in the offset in the X direction divided by twice the tangent of the angle of inclination of a respective viewing axis relative to the Z axis. Alternatively, the two images may be superimposed to form a stereoscopic image, and the two lens systems are shifted on the Z axis until the slight offset images of the feature coincide.

REFERENCES:
patent: 4539701 (1985-09-01), Galbreath et al.
patent: 4601053 (1986-07-01), Grumet
patent: 4842411 (1989-06-01), Wood
patent: 4867545 (1989-09-01), Wakimoto et al.
patent: 5028799 (1991-07-01), Chen et al.
patent: 5347363 (1994-09-01), Yamanaka

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