Method and apparatus for the interferometric wavelength measurem

Details Method and apparatus for the interferometric wavelength measurem Method and apparatus for the interferometric wavelength measurem

1981-10-08

1984-01-17

Sikes, William L.

Optics: measuring and testing

By particle light scattering

With photocell detection

356349, G01B 902

Patent

active

044261551

ABSTRACT:
The invention relates to a method and an apparatus for measuring the wavelength of an object beam of electromagnetic radiation generated from a first source by comparing with a reference of known wavelength generated from a second source A fringe-counting Michelson-type interferometer is used, having a stationary arm and a variable arm and includes a planar beam splitter a planar beam mixer, a planar reflector in the stationary arm, and a movable retroreflector in the variable arm. Prior to moving the retroreflector the reference and object beams are aligned to provide a flat interference pattern. The portions of the reference and object beams in the moveable arm are directed to and reflected by the retroreflector off center thereof. The portions of the reference and object beams in the stationary arm have an angle of reflection .alpha. at the reflector. The beam mixer is situated relative to the beam splitter such that the plane of the beam mixer is angularly inclined with respect to the plane of the beam splitter by an angle equal to .alpha.. Parallelism of the second beam portions with one another in the variable arm of the interferometer is automatically provided as a result of the alignment of the reference and object beams to a flat interference pattern, without optical feedback of the beams to their respective source and parasitic diffraction effects by the retroreflector.

REFERENCES:
patent: 4052129 (1977-10-01), Schawlow et al.
patent: 4165183 (1979-08-01), Hall et al.
patent: 4319843 (1983-03-01), Gornall

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