Method for forming an electrode for a compound semiconductor

Fishing – trapping – and vermin destroying

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437197, 437202, 437247, H01L 21441, H01L 21324

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active

052847985

ABSTRACT:
On the surface of n-type layer of Ga.sub.1-x Al.sub.x As (0.ltoreq..times..ltoreq.1) having n-type layer, Au layer is formed as a first layer, and alloying treatment is performed after Ge layer, Ni layer and Au layer are sequentially formed. The first Au layer, the second Ge layer, the third Ni layer and the fourth Au layer have the following thickness:

REFERENCES:
patent: 4927782 (1990-05-01), Davey et al.
"Contact Resistances of Au-Ge-Ni, Au-Zn and Al to III-V Compounds"--Shih et al, Solid State Electronics, 1972, vol. 15, pp. 1177-1180.

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