Sheet-like member having alignment marks and an alignment appara

Details Sheet-like member having alignment marks and an alignment appara Sheet-like member having alignment marks and an alignment appara

1983-11-21

1986-11-04

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Step and repeat

355 43, 355 45, G03B 2742

Patent

active

046207856

ABSTRACT:
A sheet-like member, such as a reticle, mask or wafer, has alignment marks, which are staggered about a pattern area thereof. The arrangement of the alignment marks is effective to enhance the degree of alignment and also to avoid undesirable overlapping of the reticle mark and the wafer mark.

REFERENCES:
patent: 3067284 (1962-12-01), Baldwin
patent: 3494695 (1970-02-01), Sollima et al.
patent: 3569718 (1971-03-01), Borner
patent: 3844655 (1974-10-01), Johannsmeier
patent: 4395117 (1983-07-01), Suzuki
patent: 4437758 (1984-03-01), Suzuki
patent: 4452526 (1984-06-01), Johannsmeier

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